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The Nova NanoLab brings advanced capabilities and flexibility to researchers and developers needing to create, modify, and characterize complex structures below 100 nanometers. It combines ultra-high resolution field emission scanning electron microscopy (SEM) and precise focused ion beam (FIB) etch and deposition to complement your existing Nanotechnology laboratory tools and extend your applications range for nanoscale prototyping, machining, 2D and 3D-characterization, and analysis.
It comes equipped with integrated 3D-characterization and nano-machining. Future capabilities will include nano-analysis. It is also capable of comprehensive beam chemistries for deposition and etch, and automation, along with nano-analysis. Some typical Nanotechnology applications are:
Nova NanoLab enables characterization of these structures via several methods, among them slice and view for 3D-reconstruction, ultra-high resolution in-lens backscattered electron imaging for phase contrast characterization, secondary ion imaging for grain contrast, SPI- simultaneous patterning and imaging mode for real-time imaging feedback on the milling process, and STEM for sub-1 nm characterization.
Digital image processor
Tools for Nano-prototyping
Equipment information can be viewed at the manufacture’s website.
|Cost for ASU Internal||Cost for ASU Internal with Staff Assistance||Cost for Other Academic/Non-Profit||Cost for Other Academic/Non-Profit with Staff Assistance|
All training is currently being scheduled by Karl Weiss, Karl.Weiss@asu.edu (480)965-3831(480)965-3831
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Emergency Phone Numbers
In an emergency, dial 911 from any campus or other phone.
Call the General ASU Emergency Information Phone at 7-9911 (on-campus phone) or 480-727-9911 or toll-free 877-278-2785 (877-ASU-ASU5) to get a recorded message. For non-emergencies, The ASU Department of Public Safety office can be reached at 5-3465 (on-campus phone) or 480-965-3465.
Active users can schedule time using their iLab account with the following link: FIB Nova 200 Schedule
If you are not currently in iLab please click on the following link: iLab registration
Policies and Procedures for Access, Development and Maintenance
The FEI Nova 200 Dual-Beam FIB has been acquired under the NSF Major Research Instrumentation Program, with additional support from Arizona State University. This instrument will be made available to the ASU and broader community as a user facility, and should facilitate a wide range of applications involving the fabrication of nanostructures. No radioactive samples, and the sample must survive in a vacuum and under the electron beam.